Carl Zeiss ULTRA Plus electron microscope

In-Lens SE detector for max. resolution

In-Lens EsB detector for sensing BSE by energy

Complete microanalytical set EDS + WDS + EBSD (OXFORD)

Charge-compensator for analysis of non-conductive samples without the need for surface treatment

Possibility of 3D display using a 4-quadrant AsB detector

Resolution: 1nm @ 15 kV; 1.6 nm @ 1 kV

Magnification: 12–1,000,000x in SE mode

Acceleration voltage: 0.02–30 kV